Measuring high aspect ratio and composite micro-trenches without damage is critical for advanced microfabrication, yet conventional coherence scanning interferometry often suffers from a low signal-to ...
(Nanowerk News) Optical measurement techniques collecting light intensity in the far-field such as conventional and confocal microscopy or coherence scanning interferometry (CSI) enable fast and ...
This experimental setup – based on coherence scanning interferometry – was developed at INRiM. Fiber sensing systems integrate photonic and optoelectronic components that are matched with fiber optics ...