SANTA CLARA, Calif. — During the SPIE Microlithography conference here, ASML MaskTools Inc. entered the phase-shift software photomask market with a product that promises to extend optical lithography ...
New research paper titled “Attenuated phase shift masks: a wild card resolution enhancement for extreme ultraviolet lithography?,” from researchers at Fraunhofer-Institut für Integrierte Systeme und ...
Numerical Technologies is trying to take its phase-shift mask technology out of just making shorter gates and into the interconnect layers of chips as the chipmakers try to push 193nm equipment deeper ...
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